Horde (semiconductor technology)

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A tray ( English carrier ) referred to in the semiconductor technology, a holder for a plurality of semiconductor wafers (engl. Wafer ). Plastic is usually used as the material (for example in the transport boxes), but other materials are also used, for example the trays in oxidation ovens are made of quartz glass .

View of the front of an FOSB cassette with 8 wafers

A rack used in transport boxes (for example FOSB cassettes, English front open shipping box ) usually offers space for 25 wafers (more rarely also 13 wafers). In the industrial environment, so-called FOUP cassettes ( front opening unified pod , German " front opening unified pod ") are used. In process systems, trays can also accommodate more or less than 25 wafers.

Machines that place the wafers individually one after the other or together with one another in the rack after a processing or production step are referred to as Einhorder . Accordingly, machines that repackage wafers from one horde to another are called Umhorder .

literature

  • Ulrich Hilleringmann: Silicon semiconductor technology . Vieweg + Teubner Verlag, 2008, ISBN 978-3-8351-0245-3 .