Fan filter unit

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FFU in the ceiling construction in the clean room of an electronics production facility

A filter fan unit or FFU or FVE (filter fan unit) describes a module consisting of a fan and a filter that draws in air from above and blows it into the room through the filter. The aim is to use it to permanently filter the circulating air. On the outlet side, the air flow is either turbulent or laminar . With the laminar variant, the air flows are parallelized by air baffles. This creates a vertical airflow from the FFU to the floor of the room. When used in combination with air conditioning , the device is referred to as a cooler-filter-fan unit (KFVE). Filter Fan Units are mainly found in ceiling systems of clean and ultra-clean rooms , such as those found in semiconductor production, the microsystem industry, the pharmaceutical or food industry.

Working principle

A large number of Filter Fan Units (FFU) are installed in the clean room ceiling. Each FFU is responsible for a specific section of the clean room. An FFU consists of a fan, a temperature sensor , a cooling unit , a heating probe and a filter. Air that escapes from the bottom of the clean room is sucked in by the FFU, brought to the desired temperature and blown back into the clean room at the desired pressure.

Each FFU can be controlled individually via a central computer. This principle makes it possible to specify individual setpoint values ​​for temperature and air flow (fan speed) for each section of the clean room supplied by an FFU. For example, an FFU that is located above a heat-generating machine will emit slightly more cooled air. In this way, a uniform temperature gradient and a uniform air flow is generated in the entire clean room. At the same time, the energy expenditure is reduced.

literature

  • Rajiv Kohli, Kashmiri L. Mittal: Developments in Surface Contamination and Cleaning: Particle Deposition, Control and Removal . Ed .: William Andrew. 1st edition. 2009, ISBN 978-1-4377-7830-4 , pp. 312 (English, limited preview in Google Book search).

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