Ion scattering spectroscopy
The ion scattering spectroscopy (also ion scattering spectroscopy ; English ion scattering spectroscopy , ISS ) denotes a group of surface-sensitive analytical methods:
- Low-energy ion scattering (Engl. Low energy ion scattering , LEIS )
- Medium-energy ion scattering spectroscopy (Engl. Medium energy ion scattering , MEIS )
- High-energy ion scattering spectroscopy (Engl. High energy ion scattering , HEIS ), usually as Rutherford backscattering spectrometry (Engl. Rutherford backscattering spectrometry , RBS referred)