Low energy ion scattering spectroscopy

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The low-energy ion scattering spectroscopy (also "scattering spectroscopy of low-energy ions", English Low Energy Ion Scattering , LEIS) is a surface- analytical method for the elementary analysis of solids . It belongs to the group of ion scattering spectroscopy (Engl. Ion Scattering Spectroscopy , ISS). Often one also finds the synonymous use of the terms ISS and LEIS in contrast to Rutherford backscattering spectrometry (Engl. Rutherford backscattering spectrometry , RBS).

description

The analysis is carried out by bombarding a surface in a vacuum with noble gas or alkali ions . The ions (mostly helium ) have energies of 1 to 10  keV and are scattered on the atoms in the outermost monolayer. By detecting the ions at a certain angle to the bombardment direction and measuring the energy of the scattered ions, conclusions can be drawn about the mass of the atom on which the scattering took place. The geometric structure of the surface (in the case of single crystals ) can also be deduced from the angle dependence of the backscattered intensity .

See also

literature

  • Horst Niehus, Werner Heiland, Edmund Taglauer: Low-energy ion scattering at surfaces . In: Surface Science Reports . tape 17 , no. 4-5 , 1993, pp. 213-303 , doi : 10.1016 / 0167-5729 (93) 90024-J (review article).
  • HH Brongersma, M. Draxler, M. de Ridder, P. Bauer: Surface composition analysis by low-energy ion scattering . In: Surface Science Reports . tape 62 , no. 3 , 2007, p. 63-109 , doi : 10.1016 / j.surfrep.2006.12.002 (review article).

Individual evidence

  1. ^ D. John O'Connor, Brett A. Sexton, Roger St. C. Smart: Surface analysis methods in materials science . Springer, 2003, ISBN 3-540-41330-8 , pp. 50 .