Nanoelectromechanical system

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A nanoelectromechanical system ( English nanoelectromechanical system , NEMS for short ) is a miniaturized device, assembly or component whose components have dimensions in the nanometer range. It thus represents the logical further miniaturization of a microsystem or a microelectromechanical system (MEMS), whereby the boundaries are fluid, but according to the ISO standard, they range from 1 to 100 nm. They typically combine transistor- like nanoelectronics with mechanical actuators , pumps and motors.

overview

Due to their small size and the associated special chemical and physical properties, it is expected that the NEMS will have a major influence on large parts of the technology in the next few years. Building and operating devices in such small dimensions can increase their efficiency and reduce their size, costs and energy consumption.

Relevance for atomic force microscopy

NEMS plays a key role in atomic force microscopy . The increased sensitivity that can be achieved with NEMS leads to improved sensors. These can better detect tensions, vibrations, forces and chemical signals at the atomic level.

Approaches to miniaturization

There are basically two methods with which structures in the nanometer range can be created. The top-down method uses classic microfabrication (e.g. optical and electron beam lithography ). The limits lie within the resolution of these methods, with, on the other hand, a high degree of control over the resulting structures. The structures are typically created from metallic thin layers or etched semiconductor layers .

In contrast, the bottom-up strategy uses the chemical properties of individual molecules, which then arrange themselves, for example, cf. self-assembling monolayer . This allows much smaller structures, but at the expense of control over the structures that actually arise.

Individual evidence

  1. DIN SPEC 1121; DIN ISO / TS 27687: 2010-02 : Nanotechnologies - Terminology and terms for nano-objects - Nanoparticles, nanofibers and nanoplates (ISO / TS 27687: 2008); German version CEN ISO / TS 27687: 2009.