Nanopositioning system
A nanopositioning system is an actuating mechanism that is able to repeatedly move to positions with a nanometer resolution or less. It usually consists of an actuator that brings about the displacement, a position measuring system that determines the actual position, and position control electronics .
Piezo actuators , lead magnesium niobate actuators, moving coil drives and electromagnetic linear motors are suitable as drives . In addition to the drive, the guide must also be free of play and low in friction. Air bearings are used for longer travel ranges; solid body joints are also suitable for short travel ranges of less than one millimeter . As a rule, capacitive sensors are used as the position measuring system.