Mass flow controller
A mass flow controller (MFC) is a device that regulates a mass flow to a setpoint . Separate calibration data must be loaded for each fluid , which is done via a programming interface. In addition to a mass flow meter (MFM), an MFC contains a programmable controller and a proportional valve . Commonly used sensors for these controllers are the calorimetric flow meter and the Coriolis mass flow meter .
Block diagram for an MFC
literature
- Gerhard Vetter (Ed.): Manual Dosing. 2nd edition, Vulkan Verlag, Essen 2001, ISBN 3-8027-2199-3 .
- Gerhard Wiegleb: Gas measurement technology in theory and practice. Springer Fachmedien, Wiesbaden 2016, ISBN 978-3-658-10686-7 .
See also
Web links
- Mass flow controller for gases (accessed May 4, 2017)
- Proportional mass flow controller based on the CTA principle (accessed on May 4, 2017)
- Development of an online exhaust gas analysis for a laboratory fermenter (accessed on May 4, 2017)