Micro sandblasting

Thermally bonded multistack microreactor made of glass. Channels and connecting holes are sandblasted. In addition to reaction channels, temperature control channels are integrated.

The micro-sandblasting ( micro sand blasting or micro powder blasting ) is a special type of sand blasting , mainly in the microsystems technology is applied.

Microsandblasting can be used to create structures in silicon and glass substrates.

First, a photolithographic mask has to be created on the substrate for the sandblasting process. The mask created in this way protects individual areas defined by the mask design. On the free, unprotected surfaces, sand particles of homogeneous size knock the material out of its composite. Depending on the duration and strength of the process, channel structures of a defined depth or even through holes are created. There are numerous fields of application for microsandblasting. This technology is mainly used in the production of channel structures, side entrances or feed holes in microfluidic chips made of glass, such as D263, Borofloat or quartz glasses.

Technical details

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• Channels to depth
• Multiple depths
• Positive bevels (angle 70-75 °)
• Roughness depending on the design and the system parameters (on average 0.4 to 1.5 µm)

Applications

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• Microfluidic channels and openings
• Side entrances (capillaries can be glued into the side of microfluidic chips, thus creating high-pressure-stable connections.)
• Connections or holes going through the wafer (for fluidic coupling of channel structures in the chip to the periphery)
• Roughening surfaces (e.g. to increase the mechanical adhesion of antibodies in chips)
• Holes for electrical vias (connection of electrical peripherals to integrated electrodes)

Individual evidence

1. ^ E. Belloy, S. Thurre, E. Walckiers, A. Sayah, MAM Gijs: The introduction of powder blasting for sensor and microsystem applications . In: Sensors and Actuators A: Physical . tape 84 , no. 3 , September 2000, pp. 330-337 , doi : 10.1016 / S0924-4247 (00) 00390-3 .