Nanometrology

The dimensional nanometrology (from: ancient Greek νᾶνος [ nános ] "dwarf" and Greek : μέτρον métron " measure , - knife ") is the science and application of measurements of the dimensions of object properties, distances and displacements in the range 1 to 1000 nm. With the development of nanotechnology , the need for quality assurance in the nanometer dimension also arises. Metrological methods and techniques cannot easily be transferred from the "macro" dimension due to physical economies of scale. Nanometrology is an area of current research.

Individual evidence

↑ Harald Bosse, Günter Wilkening: Dimensional Nanometrology in the PTB - an overview . In: Technical measurement . tape 73 , no. 1 , 2006, p. 4–18 , doi : 10.1524 / teme.2006.73.1.4 .

Web links

Review Article: Quantitative Microscopy and Dimensional Nanometrology. ptb.de; accessed on February 4, 2018 (literature collection German / English)
Homepage of the Laboratory for Nanometry. TU Braunschweig.; accessed on February 4, 2018
Physikalisch-Technische Bundesanstalt (Ed.): Work and Research Program 2015 - 2017 . April 2015, p. 56 ff . ( ptb.de ).
Nanometrology . In: Physikalisch-Technische Bundesanstalt (Hrsg.): PTB-Mitteilungen . tape 121 , no. 2 , June 2011 ( ptb.de [PDF; 7.6 MB ]).

[1] Harald Bosse, Günter Wilkening: Dimensional Nanometrology in the PTB - an overview . In: Technical measurement . tape 73 , no. 1 , 2006, p. 4–18 , doi : 10.1524 / teme.2006.73.1.4 .