SEMI Equipment Communication Standard
The SEMI Equipment Communication Standard ( SECS ) is a communication standard published by Semiconductor Equipment and Materials International (SEMI) for computers and devices in the manufacturing industry. SECS is generally understood to be the summary of the following standards:
- Semi E04: SECS I , description of the communication via serial connections
- Semi E05: SECS II , description of the messages
- Semi E37: HSMS , description of communication via Ethernet
The messages are sorted according to so-called streams and functions, "S1F1" denotes the first function in the first stream. Usually messages with odd functions are queries that are answered by messages with even functions. So is z. B. the request S1F1 ("Are you there") the request to a device to report (see. Ping in IP networks), whereupon the device replies with a response with the format S1F2.