Nanolithography
As nanolithography or nanolithography is called method, which in principle is to generate structures in the order of a few nanometers are suitable. These include, for example, EUV , electron beam and nano-embossed lithography . They are used where structuring with the aid of conventional photolithography is no longer possible and should therefore replace this in the future in the manufacture of integrated circuits .
Further areas of application are in the field of nanotechnology , for example in the manufacture of microsystems such as microreactors .