Stepping (semiconductor manufacturing)

Stepping in the means Electronics - manufacturing of semiconductors , the gradual positioning of one element, for example, in the photolithographic steps in the manufacture of semiconductors.

Often the term “stepping” also simply describes the “step size” or the desired accuracy and structure width in the phototechnical exposure of the structures of a semiconductor. One speaks then z. From 0.13 micron stepping.

Photolithography

When exposing semiconductor structures, often enlarged foils are used, which were created on plotters that previously approached the corner points of their paths step-by-step.