Photosensitive glass
Photosensitive glass (also called photosensitive glass ) is a glass from the family of lithium silicate glasses , in which the image of a mask is stored by microscopic particles in the glass by exposure to short-wave light (such as UV light) can be.
One representative is the photo-structurable glass Foturan (manufacturer's spelling: FOTURAN®), which was developed in 1984 by Schott AG from Mainz . It is a technical glass ceramic whose structuring - in contrast to conventional processes - is possible without the use of photoresist . Instead, the material is exposed to short-wave radiation, such as ultraviolet light , and then etched.
Photosensitive glass was first discovered by S. Donald Stookey in 1937.
Individual evidence
- ↑ a b Fabrication technologies for microsystems utilizing photoetchable glass by T Dietrich, W Ehrfeld, M Lacher, M Kramer and B Speit, 1996, Microelectron. Closely. 30th
- ↑ SCHOTT brand overview. SCHOTT AG, accessed on February 7, 2016 .