Aluminum zinc oxide

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Aluminum-doped zinc oxide ( AZO or ZAO ) is a transparent oxide semiconductor that is primarily used as a substitute for indium tin oxide in the LCD , TFT and semiconductor industries . Aluminum atoms are doped into a crystal lattice of zinc and oxygen atoms , which increases conductivity .

It has the CAS number 37275-76-6 or 12068-53-0.

literature

  • Ke Bin Low, Hao Gong, Eng Fong Chor: Annealing Effects on Contact Properties of Aluminum Doped Zinc Oxide Thin Films . In: International Journal of Modern Physics B . tape 16 , 01n02, 2002, p. 294-301 , doi : 10.1142 / S0217979202009780 (English).
  • Hagen Klauk, Jiunn-Ru Huang, Jonathan A Nichols, Thomas N Jackson: Ion-beam-deposited ultrathin transparent metal contacts . In: Thin Solid Films . tape 366 , no. 1-2 , 2000, pp. 272-278 , doi : 10.1016 / S0040-6090 (00) 00728-8 (English).

Individual evidence

  1. ↑ Aluminum Zinc Oxide (AZO) at Foyol ( Memento of the original from July 18, 2007 in the Internet Archive ) Info: The archive link has been inserted automatically and has not yet been checked. Please check the original and archive link according to the instructions and then remove this notice. @1@ 2Template: Webachiv / IABot / www.foyol.com
  2. ↑ M. Suchea, S. Christoulakis, K. Moschovis, N. Katsarakis, G. Kiriakidis: Nanostructured ZnO and ZAO transparent thin films by sputtering-surface characterization . In: Reviews on Advanced Materials Science . tape 10 , no. 4 , 2005, p. 335–340 ( esperia.iesl.forth.gr [PDF; 522 kB ; accessed on May 2, 2014]).