Inner hole cutting
Inner hole cutting (also ID cutting from English internal diameter or inside diameter , both in English “inside diameter”) enables highly precise cuts with very thin saw blades or foils. The cutting edge is on the inside of a round recess in the center of the circular saw blade. The saw blade is clamped on its outer edge and therefore hardly vibrates when sawing.
Inner hole cutting is a very complex cutting process with a very narrow cutting width, which is demanding and slow due to the process and is only used for expensive, brittle materials.
use
With a cutting width of 0.3 mm and less, it is mainly used to separate wafers from the silicon single-grain crystal blank. The semiconductor materials germanium and gallium arsenide as well as optical glasses, ceramics and crystals for solid-state lasers and other very special materials are processed with it.
Procedure
Inner hole cutting is a special circular saw technique in which the saw blade is clamped on the outer edge and sawed with the blade edge in the inner hole.
Inner hole separation with separator sheet
The cutting tool consists of a circular stainless steel membrane, the separating blade, with an equally circular hole in the middle, the edge of which is galvanically coated with diamond splinters as a cutting material. The separating sheet is clamped in the outer area in a frame consisting of two rings. While the tool rotates at a cutting speed of about 10-26 m / s, the centrally arranged workpiece moves with a radial feed of about 20-80 mm / min to the outer edge. A suitable cooling lubricant reduces the friction between the tool and the workpiece and dissipates a large part of the heat generated, which is why it has a significant impact on the work result. The thickness of the cut slices is usually between 0.3 and 1.5 mm.
Inner hole cutting with foils
This process or machine variant is very rare and technically extremely demanding in its application. The cutting tool here consists of a thin metal foil with a circular hole in the middle.
The outer area of the metal foil is stretched like a drum on a ring with forces close to the elastic limit , so that the greatest possible stability of the inner edge of the foil results for the (low) cutting load. The possible selection of very thin foils results in the thinnest possible cutting widths in the entire machining technology and an otherwise unattainable precision or geometric planarity due to the process-related geometrically practically perfectly even alignment of the foil under the all-round uniform tension. The cooling takes place here as a rule via air supply.
Individual evidence
- ↑ a b Eberhard Pauksch: Machining technology. 11th edition, Vieweg, Braunschweig / Wiesbaden 1996, ISBN 3-528-94040-9 , pp. 276-277.