International Technology Roadmap for Semiconductors

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The International Technology Roadmap for Semiconductors ( ITRS ) is a prognosis about the future development of semiconductor technology , which is a common thread for chip and device manufacturers. It was updated every two years by a panel of global experts from the semiconductor industry. In addition, there is a small update in the intervening years. There are z. B. called the future technology nodes. The development of the performance of micro- and nanoelectronic circuits is based on Moore's law . The ITRS has not been updated since 2017. Its successor is the International Roadmap for Devices and Systems .

history

With the progressive outsourcing of production processes by providers of special equipment, the need for clear development planning arose in order to be able to plan and control future technological needs of IC production. Since the 1980s, the Semiconductor Industry Association (SIA) took over responsibility for this coordination in the USA , which led to the creation of an American-style roadmap , the National Technology Roadmap for Semiconductors (NTRS). In 1998, the SIA teamed up with its European, Japanese, Korean and Taiwanese colleagues to create the first international development plan, the International Technology Roadmap for Semiconductors (ITRS).

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Scope and topics

The ITRS comprises a group of documents in which the requirements of future microelectronic circuits as well as the required measurement and system technology are summarized. They are a guideline for developments in the field of semiconductor technology. In addition, there are several spreadsheets with forecasts for the next 15 years. The main documents cover the following topics:

  • Executive summary
  • System drivers
  • design
  • Test & test equipment
  • Process integration, devices & structures
  • RF and A / MS Technologies for Wireless Communications
  • Emerging Research Devices
  • Emerging Research Materials
  • Front end processes
  • Lithography , deals with the techniques for structuring areas of material
  • Interconnect , deals with the electrical connections and the isolation areas in between in the BEoL
  • Factory integration
  • Assembly & Packaging
  • Environment, Safety & Health
  • Yield Enhancement , deals with improving the yield
  • Metrology , deals with the requirements for measurement technology and process control
  • Modeling & Simulation , deals with modeling and simulation

Web links

Individual evidence

  1. ^ Jean-Baptiste Waldner: Nanocomputers and Swarm Intelligence . ISTE , London 2007, ISBN 1-84704-002-0 , pp. 50-53.