Notch (wafer)

Photo of a notch on a 200 mm wafer (bottom) compared to the flat of a 150 mm wafer (top).
A match head as a yardstick

A notch ( dt. , Notch ') is a side notch in a wafer , which is used for precise positioning on a production line for semiconductor. To do this, lasers or light barriers move over the edge of the pane and thus determine the exact position of the notch. The exact orientation of the crystal lattice can thus be determined.

Notches are used from a wafer diameter of 200 mm and larger. They consume less material than the so-called flats used for positioning with smaller diameters .

The notches are created in CNC- controlled grinding machines . The position is given in degrees and is determined by an X-ray device that determines the position of the crystal lattice to within seconds . Then the notch is set.

Web links

• Wafer Manufacturing (accessed October 19, 2015)
• Lessons Learned Applicable to SEMI 3D Standards (accessed October 19, 2015)