Anton Heuberger
Anton Heuberger (born February 20, 1942 in Munich ; † February 3, 2011 ) was a German engineer and physicist .
Heuberger studied at the Faculty of Mechanical Engineering and Electrical Engineering at the Technical University of Munich, where he received his doctorate in 1973 with a thesis on the influence of the absorption location of γ-quanta [gamma-quanta] on the energy resolution of diffused semiconductor detectors with internal amplification .
Heuberger was head of the Fraunhofer Institute for Silicon Technology in Itzehoe from 1993 to 2007 . In addition, he held the chair for semiconductor technology at the Christian Albrechts University in Kiel .
Heuberger was a member of the German Academy of Science and Engineering (Acatech).
Honors
- 1988: Research Award from the Philip Morris Foundation
- for the development of X-ray lithography and microstructure technology
- 2007: Cross of Merit on Ribbon of the Federal Republic of Germany
Web links
- Cross of Merit on Ribbon to Professor Dr. Anton Heuberger, Garrit Leemreijze and Horst Schurad presented , press release from the Schleswig-Holstein state government
- Obituary notice in the Süddeutsche Zeitung
Individual evidence
- ↑ see page about Heuberger der Acatech ( page no longer available , search in web archives ) Info: The link was automatically marked as defective. Please check the link according to the instructions and then remove this notice. , accessed August 2, 2015
| personal data | |
|---|---|
| SURNAME | Heuberger, Anton |
| BRIEF DESCRIPTION | German engineer and physicist |
| DATE OF BIRTH | February 20, 1942 |
| PLACE OF BIRTH | Munich |
| DATE OF DEATH | February 3, 2011 |