Arc-Enhanced Glow Discharge

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As Arc-Enhanced Glow Discharge ( AEGD ), German: arc assisted glow discharge , the generation is a gas plasma by using the electron a vacuum arc discharge , respectively. For this purpose, the electrons of the vacuum arc discharge are accelerated to a positively biased electrode . The accelerated, high-energy electrons excite the gas atoms (e.g. Ar , H ) or gas molecules (e.g. N 2 ) and partially ionize them. The gas plasmas generated in this way are primarily used for ion cleaning and nitriding before the PVD hard material coating and DLC coating (a DLC layer is a diamond-like carbon layer ). Plasma generation using the AEGD process is used in PVD and DLC coating systems that use arc evaporators or magnetron sputter sources (e.g. in hybrid PVD systems consisting of HiPIMS magnetrons plus arc evaporation). The principle was invented by Jörg Vetter and colleagues. The AEGD systems of various technical implementations are installed in research systems as well as in industrial systems from various manufacturers for coating substrates.

Individual evidence

  1. ^ J. Vetter, T. Wallendorf: Plasma diagnostics of arc-enhanced glow discharge . Surface and Coatings Technology vol. 76-77 issue 1-3 November, 1995. p. 322-327
  2. ↑ J. Vetter, W. Burgmer, AJ Perry: Arc-enhanced glow discharge in vacuum arc machines , Surface & Coatings Technology, Volume 59, issue 1-3, (October 1, 1993), p. 152-155
  3. ↑ Technology (Plasmatec GmbH)
  4. ↑ J. Vetter, J. Müller and G. Erkens: Domino Platform: PVD Coaters for Arc Evaporation and High Current Pulsed Magnetron Sputtering . In: IOP Conference Series: Materials Science and Engineering . tape 39 , no. 012004 , doi : 10.1088 / 1757-899X / 39/1/012004 .
  5. ↑ Patent EP534066B1
  6. ↑ Patent application US5294322A
  7. ↑ (PDF) Properties of DLC coatings deposited by DC and DC with superimposed pulsed vacuum arc. Accessed August 27, 2019 .
  8. ↑ EP2705522B1. Retrieved August 27, 2019 .
  9. ↑ Microstructure and mechanical properties of ta-C films by pulse-enhanced cathodic arc evaporation: Effect of pulsed current. Retrieved August 27, 2019 .