Carl Zeiss SMT
| Carl Zeiss SMT GmbH
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|---|---|
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| legal form | GmbH |
| founding | 2001 |
| Seat | Oberkochen , Germany |
| management |
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| sales | € 1,634 million (2018/19) |
| Branch | Equipment for the semiconductor industry |
| Website | www.zeiss.de/smt |
The Carl Zeiss SMT GmbH (Semiconductor Manufacturing Technology) is the business segment semiconductor technology of Carl Zeiss AG and develops and manufactures equipment for the production of microchips . The company was 100 percent owned by Carl Zeiss AG until 2016. In November 2016, the Dutch company ASML acquired 24.9 percent of Carl Zeiss SMT GmbH for around one billion euros.
The corporate division is headquartered in the Swabian city of Oberkochen . Further locations are in Jena , Wetzlar , Roßdorf and Karmiel , Israel . A total of around 2,800 people are employed at these five locations. Around 30 percent of all employees work in research and development .
Product areas
Semiconductor manufacturing optics
This Zeiss division develops and manufactures optics for semiconductor manufacturing. The core business is lithography optics , which form the heart of a wafer scanner. The development and manufacture of the projection optics as well as the development of the associated lighting systems take place at the Oberkochen location , and the lighting systems are also manufactured at the Wetzlar location . In addition to lithography optics, the division has specialized in numerous other optics, including optical components for lasers that are used as a light source for lithographic systems.
Photomask systems
This product area develops and manufactures systems that analyze and repair defects on photo masks as well as measure and optimize specific mask properties. The photomask contains all of the structural information that is mapped onto the wafer using light.
history
In 1968 Carl Zeiss first supplied the optics for a circuit printer. Around nine years later, optics from Carl Zeiss became part of the world's first predecessor of a modern wafer stepper from David Mann (later GCA).
In 1983, the first lithography optics from Carl Zeiss was in a wafer stepper from Philips used - almost ten years later went Carl Zeiss and the Philips spin-off ASML a strategic partnership
In 1994 Carl Zeiss founded the semiconductor technology division . Carl Zeiss SMT GmbH and its subsidiaries Carl Zeiss Laser Optics GmbH and Carl Zeiss SMS GmbH followed in 2001. In the same year, construction began on the Carl Zeiss semiconductor technology plant in Oberkochen , which was completed in 2006.
In 2010, the division achieved sales of more than one billion euros for the first time. With effect from October 2014, the subsidiaries Carl Zeiss Laser Optics and Carl Zeiss SMS GmbH were merged into Carl Zeiss SMT GmbH.
Web links
Individual evidence
- ↑ Annual Report 2018/19 ZEISS Group. Carl Zeiss AG, accessed on February 21, 2020 .
- ↑ a b c data and facts. Carl Zeiss SMT GmbH, accessed on July 17, 2014 .
- ^ K. Hennings: Technological Problems of Microminiaturization (Planar Technique ) In: technica, 1967, pp. 2337-2341.
- ↑ Prosenjit Rai-Choudhury (Ed.): Microlithography (= Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1.) SPIE Press 1997, p. 83
- ↑ Stephan Paetrow: ... what belongs together. 20 years of reunification of Carl Zeiss. Hanseatischer Merkur, Hamburg 2011, ISBN 978-3-922857-51-8 , p. 111 ff.
Coordinates: 48 ° 47 ′ 2 ″ N , 10 ° 6 ′ 19 ″ E