Tuomo Suntola

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Tuomo Suntola 2014

Tuomo Suntola (* 1943 in Tampere ) is a Finnish physicist .

Suntola is considered to be one of the inventors of atomic layer deposition , which he patented in 1974 under the name Atomic layer epitaxy (ALE) and which made its breakthrough in the semiconductor industry in the 1990s and 2000s under the name Atomic layer deposition (ALD) . According to his own statements, he made little money with the invention because the patents had long expired by the time it was widely used .

Suntola graduated from the Helsinki University of Technology in 1967, a diploma and 1971 in Thor Stubb a licentiate and a Ph.D. in electron physics. In the years that followed, Suntola developed a humidity sensor for Vaisala Oy and ultra-flat displays with electroluminescence based on the ALE process for Lohja Oy . Most of his professional career was concerned with the expansion, improvement and industrial application of atomic layer deposition. In recent years Tuomo Suntola has dealt with renewable energies and has taken on responsibilities for the World Energy Council . In 2004 he retired, but is still active on the supervisory board of the ALD manufacturer Picosun Oy .

In 1983 Suntola was elected to the Tieteiden Akatemia (Finnish Technical Academy, TTA) Teknillisten , in 2001 he received the Order of the Lion of Finland (Officer's Cross), and in 2014 he was awarded the European SEMI Award . From 2015 to 2017 he was President of the Luonnonfilosofian seura (Finnish Society for Natural History). In 2018, Suntola received the Millennium Technology Prize, endowed with 1.1 million euros .

literature

  • Riikka L. Puurunen: A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy. In: Chemical Vapor Deposition. 20, 2014, p. 332, doi : 10.1002 / cvde.201402012 .

Web links

Commons : Tuomo Suntola  - collection of images, videos and audio files

Individual evidence

  1. ↑ Tech 'Nobel' awarded to Finnish physicist for small smart devices. In: phys.org. May 22, 2018. Retrieved November 8, 2018 .
  2. ↑ 2018 Millennium Technology Prize for Tuomo Suntola - Finnish physicist's innovation enables manufacture and development of information technology products. In: taf.fi. May 22, 2018, accessed November 8, 2018 .
personal data
SURNAME Suntola, Tuomo
BRIEF DESCRIPTION Finnish physicist
DATE OF BIRTH 1943
PLACE OF BIRTH Tampere