Fraunhofer Center for Nanoelectronic Technologies

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Fraunhofer Center for
Nanoelectronic Technologies
Category: research Institute
Carrier: Fraunhofer Society
Legal form of the carrier: Registered association
Seat of the wearer: Munich
Membership: Fraunhofer Group for Microelectronics
Facility location: Dresden
Type of research: Applied research
Subjects: Engineering
Areas of expertise: Semiconductor technology
Basic funding: Federal government (90%), states (10%)
Management: Hubert Lakner
Employee: 60 (from a total of 330)
Homepage: ipms.fraunhofer.de

The Fraunhofer Center for Nanoelectronic Technologies (CNT), or Fraunhofer IPMS-CNT for short, is part of the Fraunhofer Society . As one of the five business areas of the Fraunhofer Institute for Photonic Microsystems IPMS, the Fraunhofer IPMS-CNT operates an 800 m² clean room ( clean room class 1000) with process systems for atomic layer deposition , chemical-mechanical polishing , copper plating and electron beam lithography (e-beam) on 300 mm Wafer sizes. New materials, systems and processes are tested at Fraunhofer IPMS-CNT under industrial conditions and qualified for semiconductor production.

The Center for Nanoelectronic Technologies was founded on May 31, 2005 as a public-private partnership with AMD and Infineon as an independent institution and joined the Fraunhofer IPMS on January 1, 2013. The Fraunhofer IPMS is a member of numerous research networks, including the Fraunhofer Group for Microelectronics (VµE).

Research priorities

  • Development of new materials and layer systems for use in semiconductor production
  • Metrology and analytics - screening of consumables and determination of layer parameters and properties in the production line ( inline ) and in the laboratory
  • Process and technology integration for the implementation of research results in production:

Individual evidence

  1. ↑ Annual report IPMS (PDF)