Fraunhofer Center for Nanoelectronic Technologies
Fraunhofer Center for Nanoelectronic Technologies |
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Category: | research Institute |
Carrier: | Fraunhofer Society |
Legal form of the carrier: | Registered association |
Seat of the wearer: | Munich |
Membership: | Fraunhofer Group for Microelectronics |
Facility location: | Dresden |
Type of research: | Applied research |
Subjects: | Engineering |
Areas of expertise: | Semiconductor technology |
Basic funding: | Federal government (90%), states (10%) |
Management: | Hubert Lakner |
Employee: | 60 (from a total of 330) |
Homepage: | ipms.fraunhofer.de |
The Fraunhofer Center for Nanoelectronic Technologies (CNT), or Fraunhofer IPMS-CNT for short, is part of the Fraunhofer Society . As one of the five business areas of the Fraunhofer Institute for Photonic Microsystems IPMS, the Fraunhofer IPMS-CNT operates an 800 m² clean room ( clean room class 1000) with process systems for atomic layer deposition , chemical-mechanical polishing , copper plating and electron beam lithography (e-beam) on 300 mm Wafer sizes. New materials, systems and processes are tested at Fraunhofer IPMS-CNT under industrial conditions and qualified for semiconductor production.
The Center for Nanoelectronic Technologies was founded on May 31, 2005 as a public-private partnership with AMD and Infineon as an independent institution and joined the Fraunhofer IPMS on January 1, 2013. The Fraunhofer IPMS is a member of numerous research networks, including the Fraunhofer Group for Microelectronics (VµE).
Research priorities
- Development of new materials and layer systems for use in semiconductor production
- Metrology and analytics - screening of consumables and determination of layer parameters and properties in the production line ( inline ) and in the laboratory
- Process and technology integration for the implementation of research results in production:
- Energy-efficient storage solutions ( energy harvesting , lithium battery )
- Ferroelectric Random Access Memory (FRAM)
- Non-volatile data storage (NVM)
- MEMS sensors
Individual evidence
- ↑ Annual report IPMS (PDF)