Plasma coating
Under plasma coating collectively known all plasma enhanced production, in which all types of workpieces with thin layers are coated from different materials. These include:
- plasma-assisted physical vapor deposition processes (plasma PVD), such as plasma-assisted magnetron sputtering ,
- plasma-assisted chemical vapor deposition processes (plasma CVD), such as PECVD or PACVD ,
- Plasma heat treatment ,
- Plasma polymerization and
- Plasma and ion beam etching .
A further classification can be made both via the physical state of the starting materials and via the type of plasma generation (e.g. inductively coupled plasma, ICP ).
The deposited layers are used in many areas, for example optics (anti-reflective layers), product finishing ( titanium nitride as a gold substitute), wear protection , electronics , non-stick coatings or packaging technology (silicon dioxide layers as the inner coating of PET bottles ).
Individual evidence
- ↑ Monika Kaßmann: Basics of the packaging. Beuth Verlag, 2014, ISBN 978-3-410-24192-8 , p. 127 ( limited preview in the Google book search).