Plasma polymerisation

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Plasma polymerisation is a special plasma-activated variant of chemical vapor deposition (PE-CVD).

In the plasma vapor are organic (precursors precursor - monomers ) in the process chamber by a plasma activated first. The activation creates ionized molecules and the first molecule fragments in the form of clusters or chains are already formed in the gas phase . The subsequent condensation of these fragments on the substrate surface then causes the polymerisation and thus the formation of a closed layer under the influence of the substrate temperature, electron and ion bombardment .

The structure of the resulting “plasma polymers” is comparable to that of strongly cross-linked thermosets , because they form a largely statistical covalent network. The deposition of chain-like polymers in monocrystalline or polycrystalline form is therefore not possible by plasma polymerisation.

literature

  • R. Hartmann: Coating by plasma polymerisation . In: TECHNIKA . tape 19 , 1990, pp. 151-154 .
  • H. Grünwald: Polymerization to solve adhesion problems . In: plasmatec '92, University of Duisburg . 1992.
  • G. Benz: Plasma polymerisation: overview and application as corrosion and scratch protection layers . VDI-Verlag GmbH Düsseldorf, 1989, p. 71-90 .
  • H. Yasuda: Glow discharge polymerization . In: Journal of Polymer Science: Macromolecular Reviews . tape 16 , 1981, pp. 199–293 , doi : 10.1002 / pol.1981.230160104 .