Zirconium disilicide
Crystal structure | ||||||||||||||||
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__ Zr __ Si | ||||||||||||||||
General | ||||||||||||||||
Surname | Zirconium disilicide | |||||||||||||||
other names |
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Ratio formula | ZrSi 2 | |||||||||||||||
Brief description |
gray odorless solid |
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properties | ||||||||||||||||
Molar mass | 147.39 g mol −1 | |||||||||||||||
Physical state |
firmly |
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density |
4.88 g cm −3 |
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Melting point |
1520 ° C |
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safety instructions | ||||||||||||||||
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As far as possible and customary, SI units are used. Unless otherwise noted, the data given apply to standard conditions . |
Zirconium disilicide is an inorganic chemical compound of zirconium from the group of silicides .
Extraction and presentation
Zirconium disilicide can be obtained by reacting zirconium or zirconium hydride with silicon .
It is also possible to display it by reacting zirconium with silicon tetrachloride .
It is also formed when zirconia reacts with silicon.
properties
Zirconium disilicide is a metallic, shiny, gray and odorless crystalline solid with good thermal and electrical conductivity. It has an orthorhombic crystal structure with the space group Cmcm (space group no. 63) . The crystal structure contains two crystallographically different silicon atoms. One forms layers of Si 4 squares, the other zigzag chains. Silicon disilicide is insoluble in water and mineral acids with the exception of hydrofluoric acid . It burns when it glows in air. It should be noted that in addition to zirconium disilicide, other zirconium silicides are known. So Zr 3 Si with a tetragonal crystal structure isotype to that of Ti 3 P, Zr 2 Si with a melting point of 2110 ° C, a density of 6.22 and a tetragonal crystal structure isotype to that of CuAl 2 , Zr 3 Si 2 with a melting temperature of 2225 ° C and a tetragonal crystal structure isotype to that of U 3 Si 2 , Zr 5 Si 4 with a tetragonal crystal structure and zirconium monosilicide ZrSi with a melting temperature of 2095 ° C and two orthorhombic forms isotype to those of iron boride or chromium boride .
use
Zirconium disilicide is used in the semiconductor industry as a sputtering material for the production of resistant layers in electronic circuits.
Individual evidence
- ↑ a b c d e f data sheet Zirconium silicide, 99.5% (metals basis excluding Hf), Hf 2-4% from AlfaAesar, accessed on June 16, 2013 ( PDF )(JavaScript required) .
- ↑ a b c d Georg Brauer (Ed.), With the collaboration of Marianne Baudler a . a .: Handbook of Preparative Inorganic Chemistry. 3rd, revised edition. Volume II, Ferdinand Enke, Stuttgart 1978, ISBN 3-432-87813-3 , p. 1389.
- ↑ Satischandra B. Ogale: Thin Films and Heterostructures for Oxide Electronics . Springer, 2005, ISBN 0-387-25802-7 , pp. 38 ( limited preview in Google Book search).
- ^ Dale L. Perry: Handbook of Inorganic Compounds, Second Edition . Taylor & Francis US, 2011, ISBN 1-4398-1462-7 , pp. 475 ( limited preview in Google Book search).