Cobalt disilicide

Crystal structure
__ Co 2+      __ Si -
General
Surname	Cobalt disilicide
other names	Cobalt silicide Cobalt disilicide
Ratio formula	CoSi 2
Brief description	gray odorless solid
External identifiers / databases
CAS number 12017-12-8 EC number 234-616-8 ECHA InfoCard 100,031,457 Wikidata Q4162124
properties
Molar mass	115.11 g mol −1
Physical state	firmly
density	5.3 g cm −3
Melting point	1277 ° C
solubility	practically insoluble in water
safety instructions
GHS labeling of hazardous substances danger H and P phrases H: 334-315-319-317-335 P: 285-261-280-305 + 351 + 338-405-501
As far as possible and customary, SI units are used. Unless otherwise noted, the data given apply to standard conditions .

Cobalt disilicide is a chemical compound of cobalt from the group of silicides .

Extraction and presentation

Cobalt disilicide can be obtained by reacting cobalt with silicon .

${\displaystyle \mathrm {Co+2\ Si\longrightarrow CoSi_{2}} }$

properties

Cobalt disilicide is a gray, odorless solid that is practically insoluble in water. It has a cubic crystal structure of the fluorite type with the space group Fm 3 m (space group no. 225) .

use

Cobalt disilicide is widely used in chemical research.

In microelectronics and microsystem technology , cobalt silicide is used for low-resistance contacting of silicon in the production of highly integrated circuits (VLSI) in 250 nm to 90 nm technology. It initially replaced the common titanium disilicide , but from the 90 nm technology node onwards, due to physical disadvantages, it was increasingly replaced by dinickel silicide (see salicide process ).

Related links

In addition to cobalt disilicide, at least three other cobalt silicides are known: the orthorhombic Co ₂ Si , the cubic CoSi and the cubic CoSi ₃ . Two more, Co ₅ Si ₃ and Co ₃ Si, have not yet been investigated in detail.

Individual evidence

1. ↑ ^{a b c d e f g h i} data sheet Cobalt silicide, 99% (metals basis) from AlfaAesar, accessed on July 5, 2016 ( PDF )(JavaScript required) .
2. ^ ^{A b} Lih J. Chen, Institution of Electrical Engineers: Silicide Technology for Integrated Circuits . IET, 2004, ISBN 978-0-86341-352-0 , pp. 78 ( limited preview in Google Book search).
3. ^ EG Rochow: The Chemistry of Silicon Pergamon International Library of Science, Technology, Engineering and Social Studies . Elsevier, 2013, ISBN 978-1-4831-8755-6 , pp. 1360 ( limited preview in Google Book search).