Hexachlorodisilane

Structural formula
General
Surname	Hexachlorodisilane
other names	1,1,1,2,2,2-hexachlorodisilane Disilicon hexachloride HCDS
Molecular formula	(SiCl 3 ) 2
Brief description	colorless liquid
External identifiers / databases
CAS number 13465-77-5 EC number 236-704-1 ECHA InfoCard 100.033.353 PubChem 83497 Wikidata Q15546028
properties
Molar mass	268.89 g mol −1
Physical state	liquid
density	1.562 g cm −3 (25 ° C)
Melting point	2.5 ° C
boiling point	144-145.5 ° C
Refractive index	1.475 (20 ° C)
safety instructions
GHS labeling of hazardous substances danger H and P phrases H: 314 P: 280-305 + 351 + 338-310
As far as possible and customary, SI units are used. Unless otherwise noted, the data given apply to standard conditions . Refractive index: Na-D line , 20 ° C

Hexachlorodisilane is a chemical compound from the group of chlorinated silanes .

Extraction and presentation

Hexachlorodisilane (like all perchlorosilanes Si _n Cl _{2n + 2} with n = 2-6) can be obtained by reacting calcium silicide with chlorine at 230 to 250 ° C.

${\displaystyle \mathrm {CaSi_{2}+4\ Cl_{2}\longrightarrow Si_{2}Cl_{6}+CaCl_{2}} }$

It is also possible to display it by reacting silicon dichloride or silicon with chlorine .

${\displaystyle \mathrm {2\ SiCl_{2}+Cl_{2}\longrightarrow Si_{2}Cl_{6}} }$

${\displaystyle \mathrm {2\ Si+3\ Cl_{2}\longrightarrow Si_{2}Cl_{6}} }$

properties

Hexachlorodisilane is a colorless, clear liquid that smokes in air and is sensitive to hydrolysis.

use

Ultra-high-purity hexachlorodisilane is used in the semiconductor industry for the chemical vapor deposition of silicon-containing functional layers at very low temperatures. Production facilities are located in Rheinfelden in Baden, for example .

Individual evidence

1. ↑ ^{a b c d e f g} data sheet Hexachlorodisilane, 96% from Sigma-Aldrich , accessed on January 4, 2014 ( PDF ).
2. ↑ ^{a b c d} Georg Brauer (Ed.), With the collaboration of Marianne Baudler a . a .: Handbook of Preparative Inorganic Chemistry. 3rd, revised edition. Volume I, Ferdinand Enke, Stuttgart 1975, ISBN 3-432-02328-6 , p. 669.
3. ↑ Specialty chemicals: Construction of a specialty chemicals plant for electronic chips started - Evonik Industries - Spezialchemie , accessed on January 5, 2014.