Trichlorofluorosilane
| Structural formula | ||||||||||
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| General | ||||||||||
| Surname | Trichlorofluorosilane | |||||||||
| other names |
Silicon trichloride fluoride |
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| Molecular formula | SiCl 3 F | |||||||||
| Brief description |
colorless gas |
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| properties | ||||||||||
| Molar mass | 153.43 g mol −1 | |||||||||
| Physical state |
gaseous |
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| Melting point |
−121 ° C |
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| boiling point |
12 ° C |
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| safety instructions | ||||||||||
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| As far as possible and customary, SI units are used. Unless otherwise noted, the data given apply to standard conditions . | ||||||||||
Trichlorofluorosilane is an inorganic chemical compound of silicon from the group of silicon tetrahalides .
Extraction and presentation
Trichlorofluorosilane (as well as other fluorochlorosilanes) can be obtained by reacting sodium hexafluorosilicate and aluminum chloride or by halogen exchange in silicon tetrachloride with antimony (III) fluoride and antimony (V) chloride as a catalyst .
properties
Trichlorofluorosilane is a colorless gas that is very sensitive to hydrolysis.
use
Trichlorofluorosilane can be used in the semiconductor industry for the deposition of silicon layers.
Individual evidence
- ↑ a b c d e f Georg Brauer (Ed.), With the collaboration of Marianne Baudler u. a .: Handbook of Preparative Inorganic Chemistry. 3rd, revised edition. Volume I, Ferdinand Enke, Stuttgart 1975, ISBN 3-432-02328-6 , p. 679.
- ↑ This substance has either not yet been classified with regard to its hazardousness or a reliable and citable source has not yet been found.
- ↑ Google Patents: Patent US7030260 - Preparation of mixed-halogen halo-silanes , accessed January 5, 2014.