Monofluorosilane

Structural formula
General
Surname	Monofluorosilane
other names	Fluorosilane
Molecular formula	SiH 3 F
Brief description	colorless gas
External identifiers / databases
CAS number 13537-33-2 EC number 236-909-6 ECHA InfoCard 100,033,539 PubChem 66390 Wikidata Q16712763
properties
Molar mass	50.11 g mol −1
Physical state	gaseous
density	2.048 g l −1
Melting point	−98.6 ° C
safety instructions
GHS hazard labeling no classification available
As far as possible and customary, SI units are used. Unless otherwise noted, the data given apply to standard conditions .

Monofluorosilane is a chemical compound from the group of silanes .

Extraction and presentation

Monofluorosilane can be obtained by reacting fluoromethane with silicon or reacting silyl methyl ether with boron trifluoride or reacting monochlorosilane with antimony (III) fluoride .

${\displaystyle \mathrm {3\ SiH_{3}Cl+SbF_{3}\ \longrightarrow \ SiH_{3}F+SbCl_{3}} }$

properties

Monofluorosilane is a colorless gas. As a solid at 96 K, it has a monoclinic crystal structure with the space group P 2 ₁ / n (space group no. 14, position 2) and changes directly into the gaseous state at normal pressure.

use

Monofluorosilane can be used to produce silicon layers.

Individual evidence

1. ^ ^{A b c} William M. Haynes: CRC Handbook of Chemistry and Physics, 93rd Edition . CRC Press, 2016, ISBN 978-1-4398-8050-0 , pp. 87 ( limited preview in Google Book search).
2. ^ Dale L. Perry: Handbook of Inorganic Compounds, Second Edition . CRC Press, 2016, ISBN 978-1-4398-1462-8 , pp. 179 ( limited preview in Google Book search).
3. ↑ This substance has either not yet been classified with regard to its hazardousness or a reliable and citable source has not yet been found.
4. ↑ Han-Gook Cho: Investigation of Reaction Paths from Si + CH4 to C + SiH4 and from Si + CH3F to C + SiH3F: Intrinsic Reaction Coordinate Studies. In: Journal of the Korean Chemical Society. 60, 2016, p. 149, doi: 10.5012 / jkcs.2016.60.2.149 .
5. ↑ Advances in Inorganic Chemistry and Radiochemistry . Academic Press, 1961, ISBN 978-0-08-057852-1 , pp. 236 ( limited preview in Google Book search).
6. ^ CC Addison: Inorganic Chemistry of the Main-Group Elements . Royal Society of Chemistry, 1973, ISBN 978-0-85186-752-6 , pp. 188 ( limited preview in Google Book search).
7. ^ AJ Blake, EAV Ebsworth, SGD Henderson, AJ Welch: Structure of silyl fluoride, SiH3F, at 96 K. In: Acta Crystallographica Section C Crystal Structure Communications. 41, p. 1141, doi: 10.1107 / S0108270185006904 .
8. ↑ Akihisa Matsuda, Kiyoshi Yagii, Takao Kaga, Kazunobu Tanaka: Glow-Discharge Deposition of Amorphous Silicon from SiH3F. In: Japanese Journal of Applied Physics. 23, 1984, p. L576, doi: 10.1143 / JJAP.23.L576 .