Lam Research

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Lam Research Corporation

logo
legal form Corporation
ISIN US5128071082
founding 1980
Seat Fremont , California , USA
management Tim Archer (President and CEO )
Number of employees 7,300 (August 6, 2015)
sales 5,259,000,000 US dollars
Branch Systems for the semiconductor industry
Website www.lamresearch.com
As of June 28, 2015

Lam Research Corporation is one of the leading manufacturers and suppliers of process equipment and systems for the semiconductor industry . Founded in 1980 and based in Fremont , California , the company primarily manufactures systems for dry etching of various materials. Lam Research is thus in competition with other equipment manufacturers in the semiconductor industry such as Applied Materials , Tokyo Electron and Dainippon Screen Manufacturing . Lam Research is listed on the US NASDAQ Stock Exchange.

Company history

Lam Research Corporation was founded in 1980 by David K. Lam in Fremont, California. Lam was able to place his products, initially only the AutoEtch 480 , on the market relatively quickly and, in addition to the newly founded company "Trilogy", also won well-known companies such as Intel , AMD and National Semiconductor as customers. In 1984, four years after it was founded, it went public on the NASDAQ. From 1985 Lam began to build up the global presence and established branches in Asia (above all Japan ) and Europe . This was followed by branches in South Korea (1989) and China (1990) as well as a development center in Japan (1993).

Etching systems for the semiconductor industry have been Lam Research's core business since it was founded. One year after it was founded (1981), Lam presented its first product, the AutoEtch 480 , which was developed, among other things, for dry etching of polysilicon layers.

In 1985 the AutoEtch 590 etching system followed for processing silicon dioxide layers and in 1987 the successor to the AutoEtch series, the Rainbow series, was introduced. The success of this series continued with the introduction of the patented Transformer Coupled Plasma technology (TCP technology) in the 1990s. The TCP technology was used in the TCP 9400 (silicon etching , 1992) and TCP 9600 (metal etching) systems. In 2012, the 2300 Kiyo , 2300 Flex and 2300 Versys series for fully automatic etching of dielectric , conductive or metallic layers on 300 mm wafers were the latest. Also develops and manufactures Lam also facilities for the etching of holes in the silicon via ( through-silicon via , TSV) as the single wafer system TCP 9400DSiE - TSV is a technique for 3D-integrated IC is required.

In addition to the etching systems, Lam tried to place other production systems, such as cleaning and CVD coating systems , on the market since the mid / late 1980s . In 1988 the company developed a wet cleaning process for individual wafers, which was only available as a commercial product in 1991, the SP series. The successors to this series are the Vinci and DV Prime series (introduced in 2003 and 2007, respectively) and plasma-based cleaning systems such as the 2300 Coronus.

In 2008 the Swiss SEZ Holding was taken over.

In 2015, the takeover of the competitor KLA-Tencor was announced. Lam withdrew the offer a year later because of competition concerns from the United States Department of Justice.

Individual evidence

  1. ↑ Profile on lamresearch.com
  2. ↑ a b Form 10-K 2014/15
  3. ↑ Oral History: David K. Lam | SEMI.ORG . In: semi.org . 2011. Retrieved August 9, 2011.
  4. ↑ David Lam. Retrieved April 17, 2012 .
  5. ↑ AutoEtch 590 Oxide Etcher. Retrieved April 17, 2012 (product description).
  6. ↑ Lam Research at a Glance. (PDF; 550 kB) (No longer available online.) Lam Research, 2012, archived from the original on March 15, 2012 ; Retrieved April 17, 2012 . Info: The archive link was inserted automatically and has not yet been checked. Please check the original and archive link according to the instructions and then remove this notice. @1@ 2Template: Webachiv / IABot / www.lamrc.com
  7. ^ Marc Sauter: Lithography: KLA-Tencor and Lam Research merge to become the largest supplier. In: Golem.de . October 26, 2015, accessed May 10, 2016 .
  8. ^ Chip equipment maker Lam Research calls off KLA-Tencor deal. Reuters , October 6, 2016, accessed January 9, 2018 .